Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2006-06-13
2006-06-13
Hoff, Marc S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S034000, C702S081000, C700S110000, C714S025000, C714S048000, C324S512000, C324S701000
Reexamination Certificate
active
07062411
ABSTRACT:
A method of fault identification on a semiconductor manufacturing tool includes monitoring tool sensor output, establishing a fingerprint of tool states based on the plurality of sensors outputs, capturing sensor data indicative of fault conditions, building a library of such fault fingerprints, comparing present tool fingerprint with fault fingerprints to identify a fault condition and estimating the effect of such a fault condition on process output. The fault library is constructed by inducing faults in a systematic way or by adding fingerprints of known faults after they occur.
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Carbery Marcus
Hopkins Michael
O'Leary Kevin
Scanlan John
Kilpatrick & Stockton LLP
Scientific Systems Research Limited
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