Method for preventing TMR MRR drop of a slider

Details Method for preventing TMR MRR drop of a slider Method for preventing TMR MRR drop of a slider

2006-05-16

2009-06-30

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603070, C029S603120, C029S603130, C029S603150, C029S603180, C360S235700, C360S235800, C360S236300, C360S236500, C360S237000

Reexamination Certificate

active

07552524

ABSTRACT:
A method for preventing TMR (tunnel magneto-resistance) MRR (magneto-resistance resistance) drop of a slider, comprises steps of: positioning a row bar constructed by a plurality of slider structural bodies on a tray, each slider body having a pole tip with a TMR element; loading the tray into a processing chamber and evacuating the processing chamber to a preset pressure; introducing a processing gas containing oxygen gas into the processing chamber; and exposing the slider structural bodies to an etching means in the atmosphere of the processing gas to oxidize a surface of the TMR element to form an oxidation layer thereon. The invention also discloses a method for forming micro-texture on a surface of slider in same process, and a method for forming such a slider.

REFERENCES:
patent: 6687976 (2004-02-01), Koyama et al.
patent: 7148072 (2006-12-01), Fontana et al.

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