Metal working – Piezoelectric device making
Reexamination Certificate
2006-06-27
2006-06-27
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S831000, C310S340000, C360S292000, C360S294400, C360S294300
Reexamination Certificate
active
07065845
ABSTRACT:
A method for preventing operational and manufacturing imperfections in piezoelectric micro-actuators by physically and electrically isolating conductive layers of the piezoelectric material. At least one layer of electrically-conductive material and at least one layer of electrically-insulative material are applied to an actuator finger. The conductive material and the insulative material are applied one layer upon another in an alternating manner. The layer of insulative material is larger in area than the layer of conductive material. An insulative layer, applied to the actuator finger and sandwiching a conductive layer between the insulative layer and the actuator finger, at least partially encloses and electrically isolates the conductive layer by covering the conductive material on at least three sides.
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Wang et al., “Deflection Characteristics of a Trapezoidal Multilayer In-Plane Bending Piezoelectric Actuator”, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 48, No. 4, Jul. 2001, pp. 1103-1110.
PCT Search Report PCT/CN02/00392 dated Jun. 5, 2002.
Shiraishi Masashi
Yao Minggao
Kenyon & Kenyon LLP
SAE Magnetics (H.K. ) Ltd.
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