Method for preventing micromechanical structures from adhering t

Details Method for preventing micromechanical structures from adhering t Method for preventing micromechanical structures from adhering t

1996-05-14

1998-06-16

Cintins, Ivars

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

134 26, 216 2, C23G 100

Patent

active

057663670

ABSTRACT:
A method for preventing micromechanical structures from adhering to another object includes the step of immersing a micromechanical structure and its associated substrate in a chemical species that does not stick to itself. The method can be employed during the manufacture of micromechanical structures to prevent micromechanical parts from sticking or adhering to one another and their associated substrate surface.

REFERENCES:
patent: 4908805 (1990-03-01), Sprenkels et al.
patent: 4910840 (1990-03-01), Sprenkels et al.
patent: 5318928 (1994-06-01), Gegenwart et al.
patent: 5332444 (1994-07-01), George et al.
patent: 5603849 (1997-02-01), Li

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