Method for preventing fencing during process of forming an...

Details Method for preventing fencing during process of forming an... Method for preventing fencing during process of forming an...

2011-07-26

2011-07-26

Culbert, Roberts (Department: 1716)

Etching a substrate: processes

Forming or treating article containing magnetically...

C438S003000, C029S603070

Reexamination Certificate

active

07985346

ABSTRACT:
The invention provides a method for preventing fencing during process of forming an ABS on a slider substrate includes the steps of: (a) providing a slider substrate having a photo-resist covered thereon, the photo-resist having a plurality of trenches developed thereon, the plurality of trenches collectively defining an air bearing surface pattern, the plurality of trench each having at least a non-vertical sidewall, the at least non-vertical sidewall including a zigzag-shaped edge adjoining the slider substrate; (b) etching the photo-resist by oxygen ions, such that the zigzag-shaped edge is trimmed to be a straight edge and the at least non-vertical sidewall is trimmed to be a vertical sidewall; and (c) etching the slider substrate exposed from the trenches such that a fencing-free air-bearing surface is formed on the slider substrate.

REFERENCES:
patent: 6712984 (2004-03-01), Sasaki
patent: 7211195 (2007-05-01), Cyrille et al.

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