Method for preventing facet coating overspray

Details Method for preventing facet coating overspray Method for preventing facet coating overspray

1998-04-16

1999-11-23

King, Roy V.

Coating processes

Nonuniform coating

Mask or stencil utilized

427250, 4272557, 427405, B05D 132

Patent

active

059896370

ABSTRACT:
A method and apparatus for preventing overspray onto bonding pads of a laser bar during facet coating includes manufacturing inserts with gaskets that are aligned with the laser bar such that the gaskets mask off the bonding pads during the facet coating process so that no overspray onto the bonding pads occurs. The gaskets are preferably made of gold with a thin titanium coating to prevent thermal compression bonding with the bonding pads. The inserts with gaskets are preferably manufactured using standard wafer processing techniques. The gaskets are preferably formed using the compliant layer metalization process described in U.S. Pat. No. 5,559,817.

REFERENCES:
patent: 5559817 (1996-09-01), Derkits, Jr. et al.
patent: 5911830 (1999-06-01), Chakrabarti et al.

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