Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Reexamination Certificate
2006-09-19
2006-09-19
Barr, Michael (Department: 1746)
Cleaning and liquid contact with solids
Processes
Hollow work, internal surface treatment
C134S001200, C216S067000, C216S076000, C438S720000
Reexamination Certificate
active
07107998
ABSTRACT:
Carbon monoxide gas is provided in a ruthenium-deposition apparatus to clean undesired ruthenium-containing deposits from apparatus surfaces. Carbon monoxide gas is mixed with reactant gases in apparatus tubing and in a ruthenium-deposition reaction chamber to inhibit formation of undesired ruthenium deposits on apparatus surfaces and to remove ruthenium deposits.
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Draeger Nerissa Sue
Fair James A.
Greer Harold F. R.
Sung Junghwan
Barr Michael
Chaudhry Saeed
Novellus Systems Inc.
Swenson Thomas
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