Method for preparing thin film of compound oxide superconductor

Details Method for preparing thin film of compound oxide superconductor Method for preparing thin film of compound oxide superconductor

1988-05-25

1990-05-15

Morgenstern, Norman

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

427 38, 427 62, 427 42, 4272553, 4271263, 505732, 505731, B05D 512, B05D 306, C23C 1600

Patent

active

049258290

ABSTRACT:
A method for preparing a thin film of a composite copper oxide superconductor with a deposition source of the compound copper oxide, by applying an oxygen ion beam from an ion source onto a substrate while changing beam intensity during formation of the superconducting thin film, thereby to physically deposit evaporative particles from the deposition source on the substrate.

REFERENCES:
patent: 4634600 (1987-01-01), Shimizu et al.
patent: 4861750 (1989-08-01), Nogawa et al.
Japanese Journal of Applied Physics, vol. 26, No. 4 Apr. 1987 pp. L508-L509, N. Terada et al., for "Deposition of SrxLa2-xCuO4-y Thin Films by Sputtering".
Japanese Journal of Applied Physics, vol. 26, No. 4, Apr. 1987 pp. L388-L390, M. Kawaski et al., for "Composition and Structural Analalysis for Optimizing the Preparation Conditions of Super conducting (La'l-xrSrx)yCuO4-delta Films by Sputtering".
Koch et al., "Thin Films and Squids Made From YBa.sub.2 Cu.sub.3 O.sub.y " MRS ed. Gubser et al., Apr. 1987, (Anaheim, CA) pp. 81-84.
Wu et al., "Superconducting at 93 K in a New Mixed-Phase Y--Ba--Cu--O Compound System at Ambient Pressure" Phys. Rev. Lett. 58(9) Mar. 1987 p. 908.
"New Class of Superconductors Pushing Temperatures Higher" C&EN May 16, 1988, pp. 24-29.

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