Method for preparing superconductor sputtering target

Details Method for preparing superconductor sputtering target Method for preparing superconductor sputtering target

1990-08-22

1992-02-25

Beck, Shrive

Coating processes

Nonuniform coating

Mask or stencil utilized

20429813, 20419224, 427 62, 505 1, 505731, 505741, B05D 512

Patent

active

050912216

ABSTRACT:
A method for preparing a superconductor sputtering target is disclosed in which sputtering targets for coating superconductor films can be prepared essentially by mixing oxides (carbonates or fluorides) of metals such as Y, Ba, Cu (Bi, Pb), Sr, Ca,Cu) with the atomic ratio of individual elements be controlled in a specific range, an oxide superconductor paste being prepared by blending an organic binder and an organic solvent according to a specific solid percentage, and a metal such as aluminum being used as the substrate; by scraping with a squeegee and adjusting the distance between a stencil and the substrate such that the superconductor paste seeps through a mesh to be printed on the substrate and then dried; after scraping, screen-printing and drying having been repeated several times, the substrate being placed into an oven and heated to a temperature of 400.degree.-450.degree. C., at a rate of less than 5.degree. C./min, for 30 minutes and then cooled down to room temperature at the same rate of less than 5.degree. C./min.

REFERENCES:
Tabuchi et al, "Preparation of Superconducting Y--Ba--Cu--O Thick Films with Preferred C-Axis Orientation, by a Screen-Printing Method", Appl. Phys. Lett. 53(7), Aug. 1988, pp. 606-608.
Yen et al, "High Tc Superconducting Y--Ba--Cu--O Thick Film by Screen-Printing"MRS, vol. 99, Nov. 1987, pp. 711-714.

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