Coating processes – Solid particles or fibers applied – Uniting particles to form continuous coating with...
Reexamination Certificate
2004-12-09
2009-02-10
Meeks, Timothy H (Department: 1792)
Coating processes
Solid particles or fibers applied
Uniting particles to form continuous coating with...
C427S189000, C427S593000, C427S250000, C419S001000, C419S011000, C419S017000, C419S018000
Reexamination Certificate
active
07488512
ABSTRACT:
In a solid precursor evaporation system configured for use in a thin film deposition system, such as thermal chemical vapor deposition (TCVD), a method for preparing one or more trays of solid precursor is described. The solid precursor may be formed on a coating substrate, such as a tray, using one or more of dipping techniques, spin-on techniques, and sintering techniques.
REFERENCES:
patent: 2759848 (1956-08-01), Sullivan
patent: 3801294 (1974-04-01), Schultz et al.
patent: 4190965 (1980-03-01), Erickson
patent: 4817557 (1989-04-01), Diem et al.
patent: 4948623 (1990-08-01), Beach et al.
patent: 5674574 (1997-10-01), Atwell et al.
patent: 5904771 (1999-05-01), Tasaki et al.
patent: 5914001 (1999-06-01), Hansen
patent: 6024915 (2000-02-01), Kume et al.
patent: 6270839 (2001-08-01), Onoe et al.
patent: 6380080 (2002-04-01), Visokay
patent: 6544345 (2003-04-01), Mayer et al.
patent: 6897160 (2005-05-01), Derderian et al.
patent: 6921062 (2005-07-01), Gregg et al.
patent: 2002/0013052 (2002-01-01), Visokay
patent: 2002/0187632 (2002-12-01), Marsh
patent: 2003/0053799 (2003-03-01), Lei
patent: 2003/0203617 (2003-10-01), Lane et al.
patent: 2004/0016404 (2004-01-01), Gregg et al.
patent: 2004/0025370 (2004-02-01), Guenther
patent: 2004/0161545 (2004-08-01), Montano et al.
patent: 2004/0206935 (2004-10-01), Miura et al.
patent: 2005/0006799 (2005-01-01), Gregg et al.
patent: 2005/0072357 (2005-04-01), Shero et al.
patent: 2006/0115589 (2006-06-01), Vukoic
patent: 2006/0220248 (2006-10-01), Suzuki
patent: 2007/0072414 (2007-03-01), Suzuki
patent: 2008/0081743 (2008-04-01), Suzuki
patent: 908445 (1993-04-01), None
patent: 06306584 (1994-11-01), None
patent: WO 2004/010463 (2004-01-01), None
patent: WO 2004011695 (2004-02-01), None
patent: WO2004011695 (2004-02-01), None
patent: 2006058310 (2006-06-01), None
Webster's Ninth New Collegiate Dictionary, Merriam-Webster, 1986, pp. 823 and 826.
European Patent Office, International Search Report and Written Opinion, May 4, 2006, 7 pgs.
EPO, International Search Report and Written Opinion of the International Searching Authority, International Application No. PCT/US2007/060561, Mailed May 9, 2007, 9pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,962, dated Jan. 9, 2008, 6pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,962, dated May 3, 2007, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,962, dated Dec. 4, 2006, 9 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Feb. 8, 2008, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Nov. 6, 2007, 3pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Aug. 24, 2007, 12 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Dec. 29, 2006, 11 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/351,539, dated Sep. 11, 2007, 9 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/351,539, dated Apr. 5, 2007, 7 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/537,575, dated May 5, 2008, 10 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 10/998,420, dated Apr. 5, 2007, 7pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 10/998,420, dated Sep. 26, 2007, 6 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 10/998,420, dated Dec. 6, 2007, 3 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 10/998,420, dated Mar. 13, 2008, 6 pp.
Guidotti Emmanuel P.
Hara Masamichi
Kuroiwa Daisuke
Leusink Gerrit J.
Malhotra Sandra G.
Meeks Timothy H
Tokyo Electron Limited
Turocy David
Wood Herron & Evans LLP
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