Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1975-06-30
1976-10-05
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427273, 96 351, B05D 306
Patent
active
039845826
ABSTRACT:
A positive resist image is produced by exposing, to radiation in a predetermined pattern, a polymeric material containing polymerized alkyl methacrylate units and polymerized monoethylenically unsaturated acid units. The exposed and unexposed areas are distinguished by their different respective abilities to be swelled in an appropriate swelling agent, and the swelled areas are removed by dispersal in a nonsolvent liquid.
REFERENCES:
patent: 3104175 (1963-09-01), Marx et al.
patent: 3799777 (1974-03-01), O'Keefe et al.
Kovaleva "Chem. Abstracts" 80, 9023u.
Feder Ralph
Haller Ivan
Hatzakis Michael
Romankiw Lubomyr T.
Spiller Eberhard A.
IBM
Newsome John H.
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