Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
Patent
1991-04-02
1991-12-24
Shaver, Paul F.
Organic compounds -- part of the class 532-570 series
Organic compounds
Silicon containing
C07F 710
Patent
active
050754742
ABSTRACT:
According to the method for preparing hexamethyl cyclotrisilazane of the present invention, hexamethyl cyclotrisilazane can be obtained by heating a linear or cyclic silazane compound represented by the following general formula:
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patent: 4855469 (1989-08-01), Baile et al.
Hayashida Akira
Ishihara Toshinobu
Ohsaki Hiromi
Takeda Yoshihumi
Shaver Paul F.
Shin-Etsu Chemical Co. , Ltd.
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