Method for preparing hexamethyl cyclotrisilazane

Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing

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C07F 710

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050754742

ABSTRACT:
According to the method for preparing hexamethyl cyclotrisilazane of the present invention, hexamethyl cyclotrisilazane can be obtained by heating a linear or cyclic silazane compound represented by the following general formula:

REFERENCES:
patent: 3481964 (1969-12-01), Ismail et al.
patent: 3655711 (1972-04-01), Bush et al.
patent: 3677977 (1972-07-01), Bush et al.
patent: 4577039 (1986-03-01), Arkles et al.
patent: 4855469 (1989-08-01), Baile et al.

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