Semiconductor device manufacturing: process – Semiconductor substrate dicing – With attachment to temporary support or carrier
Reexamination Certificate
2006-09-12
2006-09-12
Le, Dung A. (Department: 4384)
Semiconductor device manufacturing: process
Semiconductor substrate dicing
With attachment to temporary support or carrier
C438S460000, C438S113000, C438S459000, C438S508000
Reexamination Certificate
active
07105424
ABSTRACT:
A method for forming an underfill layer on a bumped wafer is disclosed. A film is provided wherein the film includes a base layer, a removable layer and the underfill layer. The film is disposed on a bump wafer and then pressing the film under heating is performed to have the bumps of the wafer embedded in the underfill layer. Then, the removable layer with base film attached thereto is removed, so the underfill layer well encloses the bumps of the wafer and is easily separated from the base film layer and the removable layer without damaging the bumps formed on the wafer.
REFERENCES:
patent: 6794751 (2004-09-01), Kumamoto
patent: 6841413 (2005-01-01), Liu et al.
patent: 2002/0001688 (2002-01-01), Ueda et al.
patent: 2003/0034128 (2003-02-01), Matsumura et al.
patent: 2004/0185601 (2004-09-01), Stepniak et al.
Chiang Wu-Chung
Tsai Yu-Pen
Yang Kuo-Pin
Advanced Semiconductor Engineering Inc.
Bacon & Thomas PLLC
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