Method for preparing an abrasive coating

Details Method for preparing an abrasive coating Method for preparing an abrasive coating

1978-11-27

1982-05-11

Pianalto, Bernard D.

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

51283R, 51308, 427 38, B24B 100

Patent

active

043286461

ABSTRACT:
A method for preparing an abrasive coating from silane and an oxygen-containing gaseous compound such as N.sub.2 O, CO.sub.2, H.sub.2 O and the like is disclosed. The abrasive coating is prepared using the glow discharge method. The coating may be used to lap submicron articles.

REFERENCES:
Joyce, Silicon . . . Discharge Thin Solid Films, 1 (1967/1968), 481-494.

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