Method for precursor delivery

Details Method for precursor delivery Method for precursor delivery

2005-03-31

2009-02-03

Chen, Bret (Department: 1792)

Coating processes

Coating by vapor, gas, or smoke

C427S255230, C700S123000

Reexamination Certificate

active

07485338

ABSTRACT:
A method for precursor delivery includes transferring a precursor vapor from a precursor vaporization system to an intermediate precursor chamber, collecting the precursor vapor in the intermediate precursor chamber, flowing a process gas containing the collected precursor vapor to a process chamber, and exposing a substrate in the process chamber to the process gas to deposit a layer including at least one element from the precursor vapor on the substrate.

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