Method for post-OPC multi layer overlay quality inspection

Details Method for post-OPC multi layer overlay quality inspection Method for post-OPC multi layer overlay quality inspection

2008-05-20

2008-05-20

Desire, Gregory M (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S149000, C700S110000, C700S121000, C716S030000

Reexamination Certificate

active

11011384

ABSTRACT:
A method for performing post-optical proximity correction (OPC) multi layer overlay quality inspection includes the steps of generating a virtual target mask for a first mask and a second mask overlay using design rules at least partially defining the relationship between the first mask and the second mask; creating a composite aerial image representing a first mask image formed from the first mask and a second mask image formed by the second mask by performing imaging of the first mask and the second mask and overlaying the second mask image onto the first mask image; generating an overlay image map of the composite aerial image using the design rules at least partially defining the relationship between the first mask and the second mask; and comparing the overlay image map area and the virtual target mask area.

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