Wave transmission lines and networks – Coupling networks – Electromechanical filter
Patent
1980-11-03
1982-12-14
Nussbaum, Marvin L.
Wave transmission lines and networks
Coupling networks
Electromechanical filter
29 2535, 333150, 333154, H03H 308, H03H 925, H03H 942, H03H 964
Patent
active
043640168
ABSTRACT:
A method for trimming the resonant frequency of fabricated SAW devices. The resonant frequency of SAW devices of the type having a substrate with structures made of a second material, other than the substrate material, upon its surface, is decreased by removing quantities of the substrate material until the desired change in frequency is obtained. In one embodiment, the substrate material of the SAW device is removed by etching the substrate in a fluorocarbon plasma, which leaves the structure made of the second material substantially unchanged. In a second embodiment, the resonant frequency of SAW resonators is increased by heating the SAW device at a temperature in excess of 250.degree. C. until the desired change in resonant frequency is obtained.
REFERENCES:
patent: 4210883 (1980-07-01), Shaw et al.
patent: 4278492 (1981-07-01), Cross et al.
Bell, Jr. et al.--"Surface-Acoustic-Wave Resonators", Proc. of the IEEE, vol. 64, No. 5, May 1976; pp. 711-721.
Staples et al.--"Saw Resonator 2-Pole Filters", Proc. 34th Annual Frequency Control Symposium, USAERADCOM, Ft. Monmouth, May 1980; pp. 273-277.
Ilardi Terry J.
Nussbaum Marvin L.
Sperry Corporation
Terry Howard P.
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