Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-06-07
2011-06-07
Bahta, Kidest (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S098000
Reexamination Certificate
active
07957829
ABSTRACT:
A method for positioning or guiding at least one arbitrary print head or a printing unit having at least one pressure nozzle for the imprinting of thin substrates such as wafers at a defined distance above the surface of the substrate, which is to be provided on a support like a paddle or printing table. Distance sensors continuously acquired distance measurements to the surface of the substrate which is to be imprinted. An adjustment of the print head up to 6 degrees of freedom is ensured by actuators in such a manner that the section of the opening of the pressure nozzle of the print head can be adjusted so as to be coplanar to the section of the surface of the substrate which is to be imprinted. The print head is thus maintained or readjusted so as to adjust the section of the opening of the pressure nozzle of the print head to the surface of the substrate which is to be positioned on the support table so as to be coplanar and so as to maintain the coplanar position during the printing process.
REFERENCES:
patent: 69230099 (2000-03-01), None
Jonas Stefan
Merscher Michael
Redmann Lutz
Uriarte Claudio
Bahta Kidest
Jonas & Redmann Automationstechnik GmbH
Notaro, Michalos & Zaccaria P.C.
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