Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2007-10-30
2007-10-30
Luu, Thanh X. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S548000
Reexamination Certificate
active
10736911
ABSTRACT:
A method for optimizing an alignment condition of a lithographic projection apparatus. This method comprises projecting a beam of radiation on a target portion of a substrate and measuring a plurality of diffracted signals emitted by the target portion. This method further comprises calculating a variance for each of the plurality of diffracted signals, such that a plurality of variances of the diffracted signals is determined, and adjusting the alignment condition of the lithographic projection apparatus based on analysis of the plurality of variances.
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Dunbar Allan Reuben
Huijbregstse Jeroen
Schets Sicco Ian
Van Der Aa Nicolaas Petrus
ASML Netherlands B.V.
Luu Thanh X.
Pillsbury Winthrop Shaw & Pittman LLP
Wyatt Kevin
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