Electricity: measuring and testing – Electrostatic field – Using modulation-type electrometer
Patent
1997-09-25
2000-05-23
Ballato, Josie
Electricity: measuring and testing
Electrostatic field
Using modulation-type electrometer
324767, 324642, G01R 2912
Patent
active
060669527
ABSTRACT:
A method of measuring a width of an undoped or lightly doped polysilicon line is disclosed. The width measuring method includes generating carriers in the polysilicon line with an energy source; measuring a capacitance between the polysilicon line and a substrate separated from the polysilicon line by a dielectric layer; and determining a line width of the polysilicon line from the measured capacitance. The capacitance measurement includes connecting first and second probes to the polysilicon line; connecting a third probe to the substrate; connecting a first terminal of a capacitance meter to the first and second probes; connecting a second terminal of the capacitance meter to the third probe; and applying a direct current bias across the first and second probes. A capacitor may be connected between the first and second probes. Further steps include, connecting a fourth probe to a conductor that supports the substrate; and connecting the fourth probe to the third probe.
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Li James C.
Nowak Edward J.
Ballato Josie
International Business Machnies Corporation
Nguyen Vincent Q.
Walter Jr., Esq. Howard J.
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