Method for polishing thin plate and apparatus for polishing

Details Method for polishing thin plate and apparatus for polishing Method for polishing thin plate and apparatus for polishing

1997-11-18

1999-08-10

Scherbel, David A.

Abrading

Abrading process

Glass or stone abrading

451259, 451384, B24B 100

Patent

active

059349816

ABSTRACT:
A method and an apparatus, for polishing a thin plate. The method comprises the steps of: rotating a holding plate on one surface of which the thin plate is held to adhere; and bringing the thin plate held on the rotating holding plate into contact with a polishing pad mounted on a surface of a rotating turn table, to polish the thin plate. The step of polishing the one surface of the holding plate is carried out by using the polishing pad for polishing the thin plate before the thin plate is held to adhere on the one surface of the holding plate.

REFERENCES:
patent: 4010583 (1977-03-01), Highberg
patent: 5140782 (1992-08-01), Mecteau et al.
patent: 5380387 (1995-01-01), Salamon et al.
patent: 5605499 (1997-02-01), Sugiyama et al.
patent: 5755614 (1998-05-01), Adams et al.
patent: 5759087 (1998-06-01), Masumura et al.

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