Method for polishing slight area of surface of workpiece and too

Details Method for polishing slight area of surface of workpiece and too Method for polishing slight area of surface of workpiece and too

1994-03-16

1995-04-11

Lavinder, Jack W.

Abrading

Abrading process

Utilizing fluent abradant

451165, 451 1, B24B 100

Patent

active

054046807

ABSTRACT:
A method for polishing a slight region of the surface of a workpiece utilizes an actuator or actuators having piezoelectric elements. The actuators cause slight movement of a polishing portion disposed at the leading end of a polishing tool in an XY-direction parallel with the surface of the workpiece and/or a Z-direction perpendicular to the surface of the workpiece. A polishing material, including a magnetic fluid and nonmagnetic abrasive grains dispersed in the magnetic fluid, is held magnetically in a space between the polishing portion and the workpiece.

REFERENCES:
patent: 2834158 (1955-01-01), Petermann
patent: 3427480 (1966-06-01), Robinson
patent: 3482360 (1969-12-01), Legge
patent: 4821466 (1989-04-01), Kato et al.
patent: 4934103 (1990-06-01), Campergue et al.
patent: 4977707 (1990-12-01), Chachin et al.
patent: 5054244 (1991-10-01), Takamatsu et al.
patent: 5076026 (1991-12-01), Mizuguchi et al.
patent: 5185957 (1993-02-01), Mizuguchi et al.

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