Method for polishing glass substrate and process for...

Abrading – Abrading process – Utilizing fluent abradant

Reexamination Certificate

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C451S037000, C451S041000, C451S057000, C451S059000, C451S060000, C451S063000

Reexamination Certificate

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07959493

ABSTRACT:
Spots generated on a glass substrate after a polishing step are reduced. The present invention relates to a method for polishing a glass substrate including injecting a silica abrasive and a high-boiling solvent in a final glass substrate polishing step. The high-boiling solvent is preferably a solvent having a molecular weight of 300 or lower and a boiling point of 150° C. or higher. As Examples of the high-boiling solvent having a molecular weight of 300 or lower and a boiling point of 150° C. or higher includes ethylene glycol, propylene glycol and glycerine.

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