Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2005-12-20
2005-12-20
Shakeri, Hadi (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C438S693000, C451S036000
Reexamination Certificate
active
06976905
ABSTRACT:
A method and system for planarizing or polishing a substrate, particularly a memory or rigid disk, are provided. The method comprises abrading at least a portion of the surface with a polishing system comprising (i) a polishing composition comprising water, an oxidizing agent, and about 0.04 M or higher phosphate ion or phosphonate ion, and (ii) abrasive material. The present invention also provides a system for planarizing or polishing a substrate comprising (i) a polishing composition comprising water, an oxidizing agent, and about 0.04 M or higher phosphate ion or phosphonate ion, and (ii) silica particles.
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Chou Homer
Fang Mingming
Wang Shumin
Cabot Microelectronics Corporation
Lanning Robert
Shakeri Hadi
LandOfFree
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