Method for polishing a memory or rigid disk with a phosphate...

Details Method for polishing a memory or rigid disk with a phosphate... Method for polishing a memory or rigid disk with a phosphate...

2005-12-20

2005-12-20

Shakeri, Hadi (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C438S693000, C451S036000

Reexamination Certificate

active

06976905

ABSTRACT:
A method and system for planarizing or polishing a substrate, particularly a memory or rigid disk, are provided. The method comprises abrading at least a portion of the surface with a polishing system comprising (i) a polishing composition comprising water, an oxidizing agent, and about 0.04 M or higher phosphate ion or phosphonate ion, and (ii) abrasive material. The present invention also provides a system for planarizing or polishing a substrate comprising (i) a polishing composition comprising water, an oxidizing agent, and about 0.04 M or higher phosphate ion or phosphonate ion, and (ii) silica particles.

REFERENCES:
patent: 3909217 (1975-09-01), Perry
patent: 4588421 (1986-05-01), Payne
patent: 4954142 (1990-09-01), Carr et al.
patent: 4959113 (1990-09-01), Roberts
patent: 5366542 (1994-11-01), Yamada et al.
patent: 5632667 (1997-05-01), Earl et al.
patent: 5637028 (1997-06-01), Haisma et al.
patent: 5690539 (1997-11-01), Swidler et al.
patent: 5738695 (1998-04-01), Harmer et al.
patent: 5770095 (1998-06-01), Sasaki et al.
patent: 5773364 (1998-06-01), Farkas et al.
patent: 5827781 (1998-10-01), Skrovan et al.
patent: 5866031 (1999-02-01), Carpio et al.
patent: 5868604 (1999-02-01), Atsugi et al.
patent: 5922091 (1999-07-01), Tsai et al.
patent: 5954997 (1999-09-01), Kaufman et al.
patent: 6015506 (2000-01-01), Streinz et al.
patent: 6069080 (2000-05-01), James et al.
patent: 6126514 (2000-10-01), Muroyama
patent: 6152976 (2000-11-01), Ishitobi et al.
patent: 6190237 (2001-02-01), Huynh et al.
patent: 6234875 (2001-05-01), Pendergrass, Jr.
patent: 6276996 (2001-08-01), Chopra
patent: 6280490 (2001-08-01), Rader et al.
patent: WO 99 24218 (1999-05-01), None
patent: WO 01 12740 (2001-02-01), None

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