Method for plasma formation for extreme ultraviolet...

Details Method for plasma formation for extreme ultraviolet... Method for plasma formation for extreme ultraviolet...

2007-02-20

2007-02-20

Berman, Jack (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

Reexamination Certificate

active

11066655

ABSTRACT:
A device and method for generating extremely short-wave ultraviolet electromagnetic wave, utilizing a theta pinch plasma generator to produce electromagnetic radiation in the range of 10 to 20 nm. The device comprises an axially aligned open-ended pinch chamber defining a plasma zone adapted to contain a plasma generating gas within the plasma zone; a means for generating a magnetic field radially outward of the open-ended pinch chamber to produce a discharge plasma from the plasma generating gas, thereby producing a electromagnetic wave in the extreme ultraviolet range; a collecting means in optical communication with the pinch chamber to collect the electromagnetic radiation; and focusing means in optical communication with the collecting means to concentrate the electromagnetic radiation.

REFERENCES:
patent: 3911318 (1975-10-01), Spero et al.
patent: 6408052 (2002-06-01), McGeoch

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