Fishing – trapping – and vermin destroying
Patent
1993-03-02
1996-10-29
Wilczewski, Mary
Fishing, trapping, and vermin destroying
437 60, 437195, 437228, 437231, H01L 218242
Patent
active
055696180
ABSTRACT:
A method for manufacturing a semiconductor device is disclosed in which an insulating film is formed on a semiconductor substrate, elements are formed on the insulating film, the first oxide film is formed on the surface of the insulating film in the elements using plasma-enhanced chemical vapor deposition, a second oxide film is formed on the surface of the first oxide film using atmospheric-pressure chemical vapor deposition, a third oxide film is formed on the surface of the second oxide film using plasma-enhanced chemical vapor deposition, and organic spin-on-glass film is formed on the surface of the third oxide film, and etched back is performed until the organic spin-on-glass film is removed.
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Booth Richard A.
NEC Corporation
Wilczewski Mary
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