Method for performing growth of compound thin films

Details Method for performing growth of compound thin films Method for performing growth of compound thin films

1979-06-21

1983-11-01

Childs, Sadie L.

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

427255, 4272553, 4272557, 4274191, 4274192, 4274193, 4274197, C23C 1100, C23C 1300

Patent

active

044130228

ABSTRACT:
A method and an apparatus are provided for performing growth of compound thin films by alternately repeating separate surface reactions of the substances comprising the compound. A carrier gas affects a diffusion barrier between the surface reaction steps to be separated from each other. The gas phase diffusion barrier is also applied to separate the source regions of different reacting vapors both from each other and from the surface reaction zone.

REFERENCES:
patent: 3218203 (1965-11-01), Ruehrwein
patent: 3224913 (1965-12-01), Ruehrwein
patent: 3602192 (1971-08-01), Grochowski et al.
patent: 3721583 (1973-03-01), Blakeslee
patent: 3964937 (1976-06-01), Post et al.
patent: 4015558 (1977-04-01), Small et al.
patent: 4048955 (1977-09-01), Anderson
patent: 4058430 (1977-11-01), Suntola et al.

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