Method for performing a shelf lifetime acceleration test

Details Method for performing a shelf lifetime acceleration test Method for performing a shelf lifetime acceleration test

2008-05-06

2011-11-22

Rogers, David A. (Department: 2856)

Measuring and testing

Inspecting

C073S086000, C073S865600, C073S866000

Reexamination Certificate

active

08061224

ABSTRACT:
Embodiments of the invention provide a method of determining a storage lifetime of a wafer in a storage environment, the storage environment corresponding to an environment having a first value of temperature and a first value of relative humidity, the wafer having a pre-test value of a first contamination parameter, including the steps of: subjecting the wafer to a test environment for a test period, the test environment includes an environment having a second value of temperature and a second value of relative humidity; subsequently, inspecting the wafer thereby to determine a post-test value of a second contamination parameter, wherein the second value of relative humidity is greater than 30% and the second value of wafer temperature is greater than 30° C.

REFERENCES:
patent: 3304594 (1967-02-01), Madland
patent: 4091919 (1978-05-01), MacLeod et al.
patent: 4171740 (1979-10-01), Clement et al.
patent: 5352328 (1994-10-01), Obeng et al.
patent: 5576223 (1996-11-01), Zeininger et al.
patent: 5930587 (1999-07-01), Ryan
patent: 6037097 (2000-03-01), Bucchignano et al.
patent: 6511923 (2003-01-01), Wang et al.
patent: 6775624 (2004-08-01), Storino
patent: 6969638 (2005-11-01), Estepa et al.
patent: 2003/0104223 (2003-06-01), Ferm et al.
patent: 2003/0194877 (2003-10-01), Yau et al.
patent: 2004/0082174 (2004-04-01), Shieh et al.
patent: 2006/0024974 (2006-02-01), Azuri et al.
patent: 2007/0093069 (2007-04-01), Tsai et al.
Picard et al., “Failure Mechanisms of Thin Silicon Tantalum Integrated Circuits (STIC) Resistors on Multi-Chip Modul (MCM)”, 31stAnnual Proceedings of the Reliability Physics Symposium, Mar. 1993.
John W. Osenbach, “Corrosion-Induced Degradation of Microelectronic Devices”, Semiconductor Science Technology, vol. 11, 1996, pp. 155-162.
Shive et al., “Investigating the Formation of Time-Dependent Haze on Stored Wafers”, Mico Magazine, Mar. 2001.
Soden et al., “W88 Integrated Circuit Shelf Life Program”, Sandia National Laboratories, Jan. 1998.

Affiliated with

Also associated with

Rating

Method for performing a shelf lifetime acceleration test does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for performing a shelf lifetime acceleration test, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for performing a shelf lifetime acceleration test will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4259238