Method for performing a focus test and a device...

Details Method for performing a focus test and a device... Method for performing a focus test and a device...

2006-10-12

2009-11-17

Mathews, Alan A (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000, C355S077000, C430S030000

Reexamination Certificate

active

07619717

ABSTRACT:
The invention relates to a method for a focus test. The method includes performing a first projection by using a radiation beam to project a first reference mark onto a substrate to generate a first reference mark image, and performing a second projection by using a radiation beam to project a first sample mark onto the substrate to generate a first sample mark image, wherein the first reference mark image and the first sample mark image at least partially overlap and the second projection is relatively focus sensitive compared to the first projection.

REFERENCES:
patent: 2006/0103823 (2006-05-01), Yabe
patent: 2006/0103825 (2006-05-01), Kondo
patent: 2006/0132744 (2006-06-01), Hauschild et al.
patent: 2007/0222965 (2007-09-01), Koenen

Affiliated with

Also associated with

Rating

Method for performing a focus test and a device... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for performing a focus test and a device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for performing a focus test and a device... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4081741