Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-02-15
2011-02-15
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000
Reexamination Certificate
active
07889316
ABSTRACT:
A multiple-die mask pattern is arranged with dies having the same pattern in mutually opposite orientations. The method for arranging the dies includes analyzing the pattern of a single die to identify a pattern characteristic property which is non uniformly distributed over the area of the die. If the distribution is found to be asymmetric, a line separating the die area into two half-die areas is defined with respect to which the asymmetry is apparent. Half-die areas of different dies with the same pattern characteristic property are grouped together in the mask pattern. The resulting enhanced symmetry of the distribution of the pattern characteristic property over the mask area increases lithographic processability and thereby improves die yield.
REFERENCES:
patent: 6180289 (2001-01-01), Hirayanagi
patent: 2005/0208427 (2005-09-01), Hayano et al.
patent: 11-038638 (1999-02-01), None
Office Action in related Japanese application No. 2007-120465 mailed Jun. 11, 2010.
De Boeij Wilhelmus Petrus
De Groot Simon
De Klerk Johannes Wilhelmus
Vreugdenhil Ewoud
Asfaw Mesfin T
ASML Netherlands B.V.
Glick Edward J
Pillsbury Winthrop Shaw & Pittman LLP
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