Method for pattern inspection

Details Method for pattern inspection Method for pattern inspection

2006-12-26

2006-12-26

Mehta, Bhavesh M. (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C382S145000, C382S141000, C382S147000, C382S149000, C382S151000, C348S086000, C348S087000, C348S124000

Reexamination Certificate

active

07155052

ABSTRACT:
A method for inspecting a patterned surface employs reference data related to the pattern to provide a map for identifying regions which are expected to generate equivalent images. These regions are then compared in an image-to-image comparison to identify possible defects. In a first implementation, the regions are related by local symmetry operators. In a second, disjoint corner features or other features are classified and similar features compared.

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