Method for parallel alignment of a chip to substrate

Semiconductor device manufacturing: process – With measuring or testing – Packaging or treatment of packaged semiconductor

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Details

438800, H01L 2166, G01R 3126

Patent

active

061469122

ABSTRACT:
A method and apparatus for bonding a chip to a substrate is described, wherein the apparatus includes a chip holder assembly comprising an outer holder having a cavity formed therein and an inner holder for holding the chip, and by releaseably securing the inner holder within the outer holder cavity and contacting the chip to the substrate the inner holder has selective angular rotation within the cavity to make parallel the chip and the substrate.

REFERENCES:
patent: 3840978 (1974-10-01), Lynch et al.
patent: 5118584 (1992-06-01), Evans et al.
patent: 5558271 (1996-09-01), Rostoker et al.
Brochure: Research Devices, Inc., Flip Chip Aligner Bonders, 4 pages.

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