Fishing – trapping – and vermin destroying
Patent
1995-09-18
1996-08-20
Kunemund, Robert
Fishing, trapping, and vermin destroying
437107, 437110, 117102, H01L 2120
Patent
active
055478980
ABSTRACT:
A method for controlling carbon doping levels in a Distributed Bragg Reflectors (DBRs) for a Vertical Cavity Surface Emitting Laser (VCSELs) devices is provided. A first stack of mirrors (105) is deposited on the surface (101) of the substrate (102). A first cladding region (106) is deposited on the first stack of mirrors (105). An active layer (108) is deposited on the first cladding layer (106). A second cladding layer (109) is deposited on the active layer (108). A second stack of mirrors (111) is deposited on the second cladding layer (109) having a carbon doping level controlled by ratio of Group V containing organometallic (tertiarybutylarsine) to Group III organometallics (trimethylgallium and trimethylaluminum).
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R. M. Lum et al. "Controlled doping of GaAs films grown with tertiarybutylarsine" J. Appl. Phys. 67(10), 15 May 1990, pp. 6507-6512.
M. A. Tischler, et al. "Acceptor doping of (Al,Ga)As using carbon by metalorganic vapor phase epitaxy," Journal of Crystal Growth 107 (1991) pp. 268-73.
Kobayashi, et al. "Carbon-Doped GaAs Grown by Metalorganic Vapor Phase Epitaxy Using TMAs and TEG," Journal of Crystal Growth 102 (1990) pp. 183-186.
Grodzinski Piotr
Lee Hsing-Chung
Shieh Chan-Long
Fleck Linda J.
Kunemund Robert
Motorola
Parsons Eugene A.
Witting Gary F.
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