Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Patent
1998-04-16
2000-05-02
Picard, Leo P.
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
257529, 257232, 438600, 438131, H01L 2900, H01L 2170
Patent
active
060575891
ABSTRACT:
An over-etched (OE) antifuse includes a lower electrode, an antifuse layer contacting the lower electrode by an over-etched via, and a second conductive layer formed on the antifuse layer. This over-etched via forms a trench in the lower electrode, wherein in one embodiment the depth of the trench approximates the thickness of the antifuse layer. The trench narrows the programming voltage distribution of the antifuses on the device, irrespective of topology. Because active circuits can be placed underneath the OE antifuses, the present invention dramatically reduces chip size in comparison to conventional devices.
REFERENCES:
patent: 4881114 (1989-11-01), Mohsen et al.
patent: 5171715 (1992-12-01), Husher et al.
patent: 5272666 (1993-12-01), Tsang et al.
patent: 5314840 (1994-05-01), Schepis et al.
patent: 5319238 (1994-06-01), Gorden et al.
patent: 5449947 (1995-09-01), Chen et al.
patent: 5475253 (1995-12-01), Look et al.
patent: 5780919 (1998-07-01), Chua et al.
patent: 5786240 (1998-07-01), Look et al.
S. Chiang, R. Foroubi, W. Chen, F. Hawley, J. McCollum, E. Hamdy, C. Hu, "Antifuse Structure Comparison for Field Programmable Gate Arrays," International Electron Devices Meeting, pp. 24.6.1-24.6.4, Dec. 13-16, 1992.
Hart Michael J.
Karpovich Yakov
Look Kevin T.
Duong Hung Van
Harms Jeanette S.
Picard Leo P.
Xilinx , Inc.
LandOfFree
Method for over-etching to improve voltage distribution does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for over-etching to improve voltage distribution, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for over-etching to improve voltage distribution will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1595897