Fishing – trapping – and vermin destroying
Patent
1987-04-20
1989-06-27
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437160, 437162, 437178, 437184, 437200, 437 32, 437 39, 437 45, 437911, 437173, 148DIG19, 148DIG56, 148DIG123, 148DIG147, 357 22, 357 35, 357 67, H01L 2124, H01L 21225
Patent
active
048430331
ABSTRACT:
A method of diffusion of dopants (e.g. zinc) into III-V substrates (e.g. GaAs) using metal silicide and dopants (e.g. W.sub.x Si.sub.y :Zn) is disclosed. A cap layer (e.g. SiO.sub.2 or Si.sub.3 N.sub.4) is also used. The zinc tungsten silicide is formed by cosputtering zinc and tungsten silicide (W.sub.5 Si.sub.3). Applications include adjustment of threshold voltages in JFETs by rapid thermal pulsing of zinc into device channel regions and use of the zinc tungsten silicide as a base contact plus extrinsic base dopant source together with a nitride sidewall self-alignment.
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Plumton Donald L.
Tiku Shiban K.
Hearn Brian E.
Hoel Carlton H.
Quach T. N.
Romano Ferdinand M.
Sharp Mel
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