Method for optimizing contrast in an image of a sample

Details Method for optimizing contrast in an image of a sample Method for optimizing contrast in an image of a sample

1989-01-13

1991-02-12

McGraw, Vincent P.

Optics: measuring and testing

By shade or color

356419, 382 65, G01J 351

Patent

active

049919709

ABSTRACT:
This invention concerns a method for optimizing contrast in an image of a sample.
This sample (5) comprises a whole number of zones having different reflection or transmittance factors. These zones are illuminated by a light source (7) and the image is obtained at the output of an optical system (4) to be analyzed by a sensor (10) supplying on the outputs recording signals of this image. Contrast optimization consists of determining the characteristics of an optimal fiber to be inserted between the source (7) and the sample (5) to be controlled.
Application in particular for the control of in-production integrated circuits.

REFERENCES:
patent: 4028728 (1977-06-01), Sharp
The Journal IEEE Circuits and Devices Magazine--"Machine Vision Automates Inspection of Thick-Film Hybrids" by Valarie C. Bolhouse (Jan. 1986), pp. 44-48.
The Journal Feinwerktechnik Messtechnik--"Optische Halbleitermaterialprufung mit der Nikrosop-Spektralphotometrie" by Von Dr. P. Baurschmidt und Dipl.-Ing H. Scharf, Oberkochen (Dec. 1984), pp. 401-403.

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