Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-03-31
2008-07-15
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S457000
Reexamination Certificate
active
07400411
ABSTRACT:
A method for optically testing semiconductor devices or wafers using a holographic optical interference system with a light source providing a light beam of coherent wavelength with a wavelength to which the semiconductor material is transparent, splitting the light beam into a reference beam and an object beam, imposing the object beam on the semiconductor material to generate a reflected object beam reflected from interior structures of the semiconductor material, adjusting the angle of the reference beam relative to the object beam between a plurality of angles with the semiconductor material being in a different state for each angle of the reference beam, imposing the reflected object beam and the reference beam onto a detection device to create a plurality of interference patterns, one for each of the reference beam angles, and comparing the interference patterns to one another to determine characteristics within the semiconductor material.
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Attofemto, Inc.
Davis , Wright, Tremaine, LLP
Lyons Michael A
Rondeau, Jr. George C.
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