Method for optically measuring a roughness profile of surface

Details Method for optically measuring a roughness profile of surface Method for optically measuring a roughness profile of surface

1975-03-20

1978-09-19

Clark, Conrad J.

Optics: measuring and testing

Lamp beam direction or pattern

With lamp focusing

356 4, G01B 1130

Patent

active

041150058

ABSTRACT:
A method for measuring a roughness profile of a surface optically is provided. The method essentially comprises projecting through a converging optical system a pair of light rays on a surface to be measured, the light rays being focused slightly before and behind the measuring surface, receiving reflections of the projected light rays by photoelectric means to produce two different electric signals representing the intensity of the reflections of the two light rays, detecting a roughness profile of the surface on the basis of the difference of the two electric signals, and moving the light rays along the measuring surface to obtain a continuous roughness profile of the surface.

REFERENCES:
patent: 3561876 (1971-02-01), Hoffman
patent: 3715165 (1973-02-01), Smith
patent: 3719421 (1973-03-01), Poilleux et al.
patent: 3788741 (1974-01-01), Buechler

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