Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2006-11-02
2009-10-06
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Dimension
Thickness
Reexamination Certificate
active
07599076
ABSTRACT:
The present invention provides an optical height detection method and electron beam apparatus to which the method is applied, in which the focusing accuracy of the CD-SEM apparatus, a SEM inspection apparatus, and others is improved by reducing detection errors and improving detection accuracy so as to improve the accuracy of the optical height detection method, and throughput of a CD-SEM apparatus or others is improved by reducing the processing time of automatic focus control performed based on the detected height according to the optical height detection method. An optical detection optical system projects two-dimensional slit light to a measurement object from diagonally above it, detects the light reflected by the measurement object, converts a detected two-dimensional slit image into an electrical signal by a two-dimensional area sensor, eliminates slit parts having a large detection error from the electrical signal, and detects the height of the measurement object.
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Saito Keiya
Watanabe Masahiro
Yoshitake Yasuhiro
Akanbi Isiaka O
Antonelli, Terry Stout & Kraus, LLP.
Chowdhury Tarifur R.
Hitachi High-Technologies Corporation
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