Method for optical inspection and lithography

Details Method for optical inspection and lithography Method for optical inspection and lithography

1997-07-03

1999-05-04

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Using reflected radiation, e.g., reflex copying, etc.

430311, G03F 720

Patent

active

059003545

ABSTRACT:
A process for illuminating a structured surface initially introduces a fluid into a volume, the fluid nearly completely chemically inactive with respect to the structured surface. Next, pressure and temperature are established within the volume which maintains the fluid in a supercritical state. The structured surface is then immersed in the supercritical fluid, and optical energy is directed through the supercritical fluid and onto the structured surface.

REFERENCES:
patent: 5121256 (1992-06-01), Corle
patent: 5322988 (1994-06-01), Russell
patent: 5610683 (1997-03-01), Takahashi

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