Method for operating a pulsed arc evaporation source and...

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

Reexamination Certificate

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C204S298410

Reexamination Certificate

active

07943017

ABSTRACT:
A vacuum process system for surface-treating work pieces uses an arc evaporation source. The system has a first electrode connected to a DC power source and a second electrode, disposed separately from the arc evaporation source. The two electrodes are operated while being connected to a single pulsed power supply.

REFERENCES:
patent: 3836451 (1974-09-01), Snaper
patent: 4645895 (1987-02-01), Boxman et al.
patent: 4877505 (1989-10-01), Bergmann
patent: 5948224 (1999-09-01), Signer et al.
patent: 0 666 335 (1995-08-01), None
patent: 01-042574 (1989-02-01), None
Machine Translation of EP 0 666 335 A1 dated Aug. 1995.

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