Method for obtaining oriented gold and piezoelectric films

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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204192SP, 204192R, 310322, 427 38, 427100, C23C 1500

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active

044288085

ABSTRACT:
A method for depositing thin films of gold having a high degree of orientation on surfaces previously yielding only unoriented gold by sputtering a layer of glass over the surface of the material followed by depositing a layer of oriented gold over the layer of glass. The additional step of depositing a layer of piezoelectric material over the layer of oriented gold is included to provide piezoelectric material having good orientation due to the oriented gold. A transducer is described having a layer of glass deposited over a material which previously provided unoriented gold followed by a layer of gold, a layer of piezoelectric material and a top conductive electrode to form a transducer wherein the piezoelectric material has a high degree of orientation.

REFERENCES:
patent: 3543058 (1970-11-01), Klemens
patent: 3632439 (1972-01-01), DeKlerk
patent: 3655429 (1972-04-01), DeKlerk
patent: 3689784 (1972-09-01), DeKlerk
patent: 3825779 (1974-07-01), DeKlerk
Augis et al., J. Appl. Phys. 50 (11), Nov. 1979, pp. 6887-6891.
Mattox, J. Appl. Phys. 37 (1966), pp. 3613-3615.

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