Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate
2006-04-20
2010-10-19
DeCady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Optimization or adaptive control
C700S063000, C700S031000, C700S121000, C318S611000, C318S638000
Reexamination Certificate
active
07818073
ABSTRACT:
A method of obtaining improved feedforward data for a feedforward control system to move a component through a setpoint profile is presented. The setpoint profile includes a plurality of target states of the component each to be substantially attained at one of a corresponding sequence of target times. The method includes moving the component with the feedforward control system according to the setpoint profile using a first set of feedforward data; measuring a state of the component at a plurality of times during the movement; comparing the measured states with corresponding target states defined by the setpoint profile to obtain a set of errors; filtering the set of errors with a non-linear filter; generating improved feedforward data based on the filtered errors, the improved feedforward data being usable by the feedforward control system to move the component more accurately through the setpoint profile.
REFERENCES:
patent: 3795799 (1974-03-01), Courtiol
patent: 5521036 (1996-05-01), Iwamoto et al.
patent: 5757149 (1998-05-01), Sato et al.
patent: 5831739 (1998-11-01), Ota
patent: 6114670 (2000-09-01), Erickson et al.
patent: 6260282 (2001-07-01), Yuan et al.
patent: 6355994 (2002-03-01), Andeen et al.
patent: 6453206 (2002-09-01), Soraghan et al.
patent: 6694498 (2004-02-01), Conrad et al.
patent: 6751602 (2004-06-01), Kotoulas et al.
patent: 6856191 (2005-02-01), Bartuni
patent: 6904422 (2005-06-01), Calise et al.
patent: 6949844 (2005-09-01), Cahill et al.
patent: 7181296 (2007-02-01), Rotariu et al.
patent: 7199878 (2007-04-01), Takeishi
patent: 7345448 (2008-03-01), Watt et al.
patent: 7498760 (2009-03-01), Akiyama
patent: 7627403 (2009-12-01), Miller et al.
patent: 2003/0043354 (2003-03-01), Butler
patent: 2004/0238758 (2004-12-01), Antonius Theodorus Dams
patent: 2005/0043834 (2005-02-01), Rotariu et al.
patent: 2005/0231706 (2005-10-01), Yang et al.
patent: 1265106 (2002-12-01), None
patent: 1480093 (2004-11-01), None
patent: WO 2004074951 (2004-09-01), None
Bristow, D.A.; Tharayil, M.; Alleyne, A.G., “A survey of iterative learning control,” Control Systems Magazine, IEEE , vol. 26, No. 3, pp. 96-114, Jun. 2006 (state of art review for background only).
Helfrich B E, Lee C, Bristow D A, Xiaohui X, Dong J, Alleyne A G and Salapaka S 2008 Combined Hoo-feedback and iterative learning control design with application to nanopositioning systems Proc. American Control Conf. (Seattle, WA, June) pp. 3893-3900.
S. Joe Qin, Thomas A. Badgwell, A survey of industrial model predictive control technology, Control Engineering Practice, vol. 11, Issue 7, Jul. 2003, pp. 733-764.
I. Rotariu, R.M.L. Ellenbroek, G.E. van Baars, M. Steinbuch, “Iterative Learning Control for variable setpoints, applied to a motion system”, European Control Conference 2003, pp. 1-8.
Bin Yao, Li Xu, Adaptive robust motion control of linear motors for precision manufacturing, Mechatronics, vol. 12, Issue 4, May 2002, pp. 595-616.
ASML Netherlands B.V.
DeCady Albert
Koninklijke Philips Electronics , N.V.
Pillsbury Winthrop Shaw & Pittman LLP
Robertson Dave
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