Method for obtaining an extreme ultraviolet radiation...

Details Method for obtaining an extreme ultraviolet radiation... Method for obtaining an extreme ultraviolet radiation...

2005-08-09

2005-08-09

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

C355S067000, C355S053000

Reexamination Certificate

active

06927405

ABSTRACT:
Method for obtaining extreme ultraviolet radiation and a source thereof, application in lithography.According to the invention, at least a solid target (28) is used, emitting extreme ultraviolet radiation by interaction with a laser beam focussed on a face (30) of the target. This target is able to emit a portion of the radiation from the opposite face (37) and this portion is collected and transmitted.

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Steven J. Haney, Kurt W. Berger, Glenn D. Kubiak, Paul D. Rockett and John Hunter, “Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source”, Dec., 1993, pp. 6934-6937, Applied Optics, vol. 32, No. 34.
H. Hirose, K. Ando. and Y. Aoyagi, “Novel x-ray source using rear side x-ray emission from the foil target”, 1996, pp. 277-280, Prog. Crystal Growth and Charact. vol. 33.

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