Plastic and nonmetallic article shaping or treating: processes – Direct application of electrical or wave energy to work – Polymerizing – cross-linking – or curing
Reexamination Certificate
2008-04-03
2010-06-08
Del Sole, Joseph S (Department: 1791)
Plastic and nonmetallic article shaping or treating: processes
Direct application of electrical or wave energy to work
Polymerizing, cross-linking, or curing
C264S220000, C977S887000, C425S810000, C425S174400, C425S385000, C425S387100
Reexamination Certificate
active
07731889
ABSTRACT:
A nanoimprinting configuration includes a UV light diffuser that randomizes a collimated UV light beam so as to diffuse the shadowing effect from any defect object that resides in the UV optical path. In addition, a combination center circular pad and outer ring-shaped pad form a donut-shaped “non-contact” area between the two pad pieces. The size and shape of the two pad combination are designed to avoid direct gel pad contact above the patterned imprint zone on the disk substrate. The purpose of the gel pad, non-contact configuration is to eliminate any possible surface deformation incurred along the loading column and thereby avoid the elastic propagation of any deformations to the stamper resist surface.
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EP Search Report for Application No. 07250334.5, dated Nov. 4, 2009, 14 pages.
Bandic Zvonimir Z.
Wu Tsai-Wei
Del Sole Joseph S
Hitachi Global Storage Technologies - Netherlands B.V.
Le Ninh V
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