Optics: measuring and testing – Angle measuring or angular axial alignment – Alignment of axes nominally coaxial
Reexamination Certificate
2006-06-21
2010-10-05
Chowdhury, Tarifur R. (Department: 2886)
Optics: measuring and testing
Angle measuring or angular axial alignment
Alignment of axes nominally coaxial
C250S234000, C250S309000, C250S307000, C427S402000, C435S006120
Reexamination Certificate
active
07808628
ABSTRACT:
Embodiments in accordance with the present invention relate to methods and apparatuses for aligning a scanning probe used to pattern a substrate, by comparing the position of the probe to a reference location or spot on the substrate. A first light beam is focused on a surface of the substrate as a spatial reference point. A second light beam then illuminates the scanning probe being used for patterning. An optical microscope images both the focused light beam, and a diffraction pattern, shadow, or light backscattered by the illuminated scanning probe tip of a scanning probe microscope (SPM), which is typically the tip of the scanning probe on an atomic force microscope (AFM). Alignment of the scanning probe tip relative to the mark is then determined by visual observation of the microscope image. This alignment process may be repeated to allow for modification or changing of the scanning probe microscope tip.
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Akanbi Isiaka O
California Institute of Technology
Chowdhury Tarifur R.
Townsend and Townsend / and Crew LLP
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