Method for multi-step temperature control of a substrate

Details Method for multi-step temperature control of a substrate Method for multi-step temperature control of a substrate

2007-11-20

2007-11-20

Paschall, Mark (Department: 3742)

Electric heating

Metal heating

By arc

C219S121430, C219S121400, C156S345520, C118S724000, C438S715000

Reexamination Certificate

active

11526119

ABSTRACT:
A method of changing the temperature of a substrate during processing of the substrate includes providing the substrate on a substrate holder, the substrate holder including a temperature controlled substrate support for supporting the substrate, a temperature controlled base support for supporting the substrate support and a thermal insulator interposed between the temperature controlled substrate support and the temperature controlled base support. The method further includes setting the temperature of the base support to a first base temperature corresponding to a first processing temperature of the substrate, setting the substrate support to a first support temperature corresponding to the first processing temperature of the substrate, setting the temperature of the base support to a second base temperature corresponding to a second processing temperature of the substrate, and setting the substrate support to a second support temperature corresponding to the second processing temperature of the substrate.

REFERENCES:
patent: 5445675 (1995-08-01), Kubodera et al.
patent: 5667622 (1997-09-01), Hasegawa et al.
patent: 6566632 (2003-05-01), Katata et al.
patent: 6847014 (2005-01-01), Benjamin et al.
patent: 6921724 (2005-07-01), Kamp et al.
patent: 2003/0015517 (2003-01-01), Fure et al.
patent: 10-083960 (1998-03-01), None
patent: 2000-269189 (2000-09-01), None

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