Method for multi-step temperature control of a substrate

Details Method for multi-step temperature control of a substrate Method for multi-step temperature control of a substrate

2011-05-31

2011-05-31

Paschall, Mark H (Department: 3742)

Electric heating

Metal heating

By arc

C219S486000, C219S497000, C118S724000, C156S345510

Reexamination Certificate

active

07952049

ABSTRACT:
A method of changing the temperature of a substrate during processing of the substrate includes providing the substrate on a substrate holder, the substrate holder including a temperature controlled substrate support for supporting the substrate, a temperature controlled base support for supporting the substrate support and a thermal insulator interposed between the temperature controlled substrate support and the temperature controlled base support. The method further includes setting the temperature of the base support to a first base temperature corresponding to a first processing temperature of said substrate, setting the substrate support to a first support temperature corresponding to said first processing temperature of said substrate, setting the temperature of the base support to a second base temperature corresponding to a second processing temperature of said substrate, and setting the substrate support to a second support temperature corresponding to said second processing temperature of said substrate.

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