Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-01-30
2007-01-30
Trinh, Minh (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S839000, C029S843000, C029S874000, C029S884000, C148S525000, C148S565000, C219S602000, C219S636000
Reexamination Certificate
active
10027476
ABSTRACT:
A method for heat-treating a plurality of microelectronic structures attached to a non-metallic substrate is disclosed. The method comprises the steps of: (a) placing the non-metallic substrate and the plurality of microelectronic structures in an oscillating electromagnetic field, whereby the plurality of microelectronic structures are heated by the oscillating electromagnetic field and the non-metallic substrate is essentially not heated by the oscillating electromagnetic field; (b) maintaining the non-metallic substrate and the plurality of microelectronic structures in the oscillating electromagnetic field until each of the plurality of microelectronic structures obtains a defined heat-treatment temperature substantially greater than an ambient temperature; (c) removing the non-metallic substrate and the plurality of microelectronic structures from the oscillating electromagnetic field; and (d) cooling the plurality of microelectronic structures to the ambient temperature.
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Burraston N. Kenneth
FormFactor Inc.
Nguyen Donghai D.
Trinh Minh
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