Method for monolayer deposition

Details Method for monolayer deposition Method for monolayer deposition

2005-01-26

2008-12-02

Pert, Evan (Department: 2826)

Coating processes

Measuring, testing, or indicating

Thickness or uniformity of thickness determined

C427S248100, C438S014000, C438S758000, C438S778000

Reexamination Certificate

active

07459175

ABSTRACT:
An adaptive real time thermal processing system is presented that includes a multivariable controller. The method includes creating a dynamic model of the MLD processing system and incorporating virtual sensors in the dynamic model. The method includes using process recipes comprising intelligent set points, dynamic models, and/or virtual sensors.

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